Learning objectives

The lecture provides the student with the fundamentals of surface metrology using non-contact optical methods, from instrumentation to surface data analysis.

Program

Fundamentals of optical surface metrology and surface data analysis.
State-of-the-art of active optical techniques is reviewed, including interferometry-based, time-of-flight-based, and triangulation-based.
Principles of surface texture metrology are given, focusing on the meaning and use of the Areal Field Parameters by ISO international standards.
Filtration and spectral analysis for multi-scale characterization of the surface texture are discussed.
Examples of useful MATLAB scripting for roughness computation are shown.

Didactic methods

lecture